JPH0160540U - - Google Patents
Info
- Publication number
- JPH0160540U JPH0160540U JP15621187U JP15621187U JPH0160540U JP H0160540 U JPH0160540 U JP H0160540U JP 15621187 U JP15621187 U JP 15621187U JP 15621187 U JP15621187 U JP 15621187U JP H0160540 U JPH0160540 U JP H0160540U
- Authority
- JP
- Japan
- Prior art keywords
- side plate
- opening
- closing mechanism
- storage container
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987156211U JPH0719151Y2 (ja) | 1987-10-13 | 1987-10-13 | 半導体ウェハ用搬送装置の収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987156211U JPH0719151Y2 (ja) | 1987-10-13 | 1987-10-13 | 半導体ウェハ用搬送装置の収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160540U true JPH0160540U (en]) | 1989-04-17 |
| JPH0719151Y2 JPH0719151Y2 (ja) | 1995-05-01 |
Family
ID=31434544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987156211U Expired - Lifetime JPH0719151Y2 (ja) | 1987-10-13 | 1987-10-13 | 半導体ウェハ用搬送装置の収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719151Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57126144A (en) * | 1981-01-29 | 1982-08-05 | Toshiba Corp | Conveying method for wafer |
| JPS60160539U (ja) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | 半導体ウエハ等収納容器 |
-
1987
- 1987-10-13 JP JP1987156211U patent/JPH0719151Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57126144A (en) * | 1981-01-29 | 1982-08-05 | Toshiba Corp | Conveying method for wafer |
| JPS60160539U (ja) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | 半導体ウエハ等収納容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719151Y2 (ja) | 1995-05-01 |